Statistically sound evaluation of trace element depth profiles by ion beam analysis
نویسندگان
چکیده
منابع مشابه
Elemental thin film depth profiles by ion beam analysis using simulated annealing—a new tool
Rutherford backscattering spectrometry (RBS) and related techniques have long been used to determine the elemental depth profiles in films a few nanometres to a few microns thick. However, although obtaining spectra is very easy, solving the inverse problem of extracting the depth profiles from the spectra is not possible analytically except for special cases. It is because these special cases ...
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ژورنال
عنوان ژورنال: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
سال: 2012
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2012.03.024